TFA-Thin Film Analyzer
Physical properties measurement of thin films
Exiting new opportunities
Revolutionary physical properties thin film characterization system
Physical properties of thin films differ from bulk material!
- Parasitic surface effects are much stronger due to smaller dimensions and high aspect ratios (e.g. Boundary scattering).
- Quantum confinement
The LINSEIS Thin Film Analyzer is the perfect tool to characterize a broad range of thin film samples in an extremely comfortable and fast way. It is an easy to use, single stand alone system and delivers highest quality results using a patent pending measurement design.
The big advantage of this system is the simultaneous determination of a broad range of physical properties within one measurement run. All measurements are take in the same (in-plane) direction and are very comparable.
Main System Characteristics:
- High quality, easy to use characterization system for thin films (nm to µm range).
- Temperature dependent measurements (-170 to +200°C – optional 300°C).
- Easy sample preparation and handling.
- Chip based measurement device with pre structered chips as consumeables.
- High measurement flexibility (sample thickness, sample resistivity, deposition methods).
- All measurements are taken from same sample in one run.
- It is possible to measure samples with metallic behavior as well as ceramics or organics.
Consists of measurement chamber, vacuum pump, basic sample holder with included heater, measurement electronics, system integrated lock-in amplifier, electronics and evaluation software for 3w-method, PC and LINSEIS Software package. The design is optimized to measure following physical properties:
- ρ - Electrical Resistivity / σ - Electrical Conductivity
- S - Seebeck Coefficient
- ε – Emissivity (depends on sample properties)
Consisting of system integrated lock-in amplifier, electronics and evaluation software for 3 Omega method. The design is optimized for measuring the following parameters:
- λ - Thermal Conductivity
- cp - Specific Heat
Optional Electromagnet to measure the following parameters:
- AH - Hall Constant
- μ – Mobility (calculation depending on model)
- n - Charge carrier concentration (calculation depending on model)
TFA with magnetic option:
|Temperature range*:||RT up to 200°C|
|optional||-170°C up to 300°C|
|Sample thickness:||From nm to µm range (depends on sample)|
|Measurement principle:||Chip based (pre-structured measurement chips, 15 pcs. per box)|
|Deposition techniques:||Include: PVD (sputtering, evaporation), ALD, Spin coating, Ink-Jet Printing and more|
|Measured parameters:||Electrical Conductivity / Resistivity|
|Optional:||Thermal Conductivity (3 Omega)|
|Hall Constant / Mobility / Charge carrier conc.|
|Electromagnet up to 1 T|
|Vacuum:||up to 10E-5mbar|
|Thermal Conductivity||0.05 up to 200 W/m∙K|
|Electrical Resistivity||0.05 up to 1 ∙ 10E6S/cm|
|Seebeck Coefficient||5 up to 2500 μV/K|
|Repeatability & Accuracy|
|Thermal Conductivity||± 10% (for most materials)|
|Electrical Resistivity||± 6% (for most materials)|
|Seebeck Coefficient||± 7% (for most materials)|
All thermo analytical devices of LINSEIS are PC controlled, the individual software modules exclusively run under Microsoft® Windows® operating systems. The complete software consists of 3 modules: temperature control, data acquisition and data evaluation. The Linseis 32 - bit software encounters all essential features for measurement preparation, execution and evaluation, just like with other thermo analytical experiments.
- Fully compatible MS® Windows™ 32 – bit software
- Data security in case of power failure
- Thermocouple break protection
- Evaluation of current measurement
- Curve comparison
- Storage and export of evaluations
- Export and import of data ASCII
- Data export to MS Excel
- Easy and user-friendly data input for temperature segments, gases etc.
- Software automatically displays corrected measurements after the energy pulse
- Fully automated measurement
- Model wizard for selection of the appropriate model
- Direct evaluation of the measured data for the calculation of
- Thermal conductivity
- Specific heat
- Resisitivty / Conductivity
- Seebeck Coefficient
A typical application is the characterization of thin films made out of thermoelectric materials. A lot of research is done to improve the efficiency of thermoelectric devices.
For the development and design of new and robust integrated devices like sensors or microchips, the semiconducting industry needs to know a lot about the physical properties of the used films. For example for the heat management or the electric insolation of such devices.
Thermal barrier coatings
Another interesting field for thin films are thermal barrier coatings as they are used in aircraft engines. Many new materials have been developed and characterized, especially in regard to their thermal behavior.
The last application example is the determination of material parameters for thin films used in tools. The understanding is very important to avoid wear due to tribological stress to ensure an extended product life cycle.
Measurements of a 110 nm thick Bismuth Antimony film prepared by thermal evaporation under vacuum conditions from -160°C up to +140°C.
- ../../fileadmin/user_upload/LINSEIS_TFA_ENG_v2.pdf (2.2 M Bytes)