HCS 1/10/100

Characterization of semiconductors and components

Description

To the point

The Linseis HCS systems are mainly used to characterize semiconductor materials.
They can determine both the Hall constant and the specific resistance, as well as the charge carrier concentration and Hall mobilities of the samples derived from these.
The desktop base unit is available in different configurations, which can be equipped with different sample holders for different sample geometries and temperature requirements.

An optional low-temperature extension for the use of liquid nitrogen and a high-temperature version up to 800°C guarantee that all conceivable areas of application can be covered.
The built-in permanent and electromagnets provide fixed or variable magnetic fields of up to almost one Tesla.
The associated, comprehensive and Windows©-based software enables the uncomplicated recording of I-V and I-R curves as well as the measurement and evaluation of Hall mobility, electrical conductivity and charge carrier concentration.

The Linseis HCS systems can measure a wide variety of materials, including Si, SiGe, SiC, GaAs, InGaAs, InP, GaN (N type & P type) as well as metal layers, metal oxides and many more.
We would be happy to demonstrate the performance of the device to you using sample measurements in our application laboratory.


Measuring functions:

  • Load carrier density (layer [1/cm²]/solid material [1/cm³])
  • Hall constant [cm³/C]
  • Reverb mobility [cm²/Vs]
  • Sheet resistance [Ω]
  • Specific resistance [Ωcm]
  • Electrical conductivity[S/cm]
  • Alpha (ratio of horizontal to vertical resistance)
  • Magnetoresistance
  • Seebeck coefficient (µV/K)


Device features:

  • Gas-tight measuring chamber, which enables measurements under defined atmospheres or vacuum conditions
  • Magnets with 120 mm diameter for highest field homogeneity and maximum accuracy (poles up to 50mm x 50mm are possible)
  • Modular and upgradeable system design
  • High-temperature version up to 600°C/873K
  • LED lighting option (several wavelengths are possible)
  • Optional lock-in amplifier for measurements with minimal noise
  • Connection for the use of external measuring electronics
  • Integrated software package for user-friendly operability

Unique features

Versatile measurement options: Determination of Hall constant, specific resistance,

Charge carrier concentration and Hall mobility.

Wide temperature range: measurements of low temperatures (LN2) up to 800°C possible.

Modular system design: Customizable with different sample holders and temperature extensions.

High field homogeneity: 120 mm magnets for maximum accuracy.

Integrated software: User-friendly operation and comprehensive data analysis.

Service hotline

+49 (0) 9287/880 0

Our service is available Monday to
Thursday from 8 am to 4 pm
and Friday from 8 am to 12 pm.

We are here for you!

Specifications

Black on white

MODELL

HCS 1

Temperaturbereich:Von LN2 bis zu 600°C in verschiedenen Ausführungen
-160°C (kontrollierte Abkühlung)
-196°C (Abkühlung)
Magnet:zwei Permanentmagnete mit +/- 0,7T
Durchmesser der Stange 120 mm
für höchste Gleichmäßigkeit (+/- 1% über 50mm)
Stromzufuhr:DC 1nA bis zu 125mA (8 Dekaden / Einhaltung +/- 12V)
Messung der Spannung:DC rauscharm / geringe Abweichung 1μV bis zu 2500mV, 4 Dekaden Verstärkung, Digitale Auflösung: 300pV
Sensoren/ Probengeometrie:- von 5 x 5 mm bis 12,5 x 12,5 mm, maximale Probenhöhe 3 mm
- von 17,5 x 17,5 mm bis zu 25 x25 mm, maximale Probenhöhe 5 mm
- von 42,5 x 42,5 mm bis zu 50 x 50 mm, maximale Probenhöhe 5 mm
- Hochtemperaturplatte, 10x10mm, max. Probenhöhe 2mm
Widerstandsbereich:10-4 bis zu 107(Ωcm)
Trägerstoffkonzentration:107 bis zu 1021cm-3
Mobilitätsbereich:0,1 bis 107(cm2/Volt sek)
Atmosphären:Vakuum, inert, oxidierend, reduzierend
Temperaturgenauigkeit:0.05°C

MODELL

HCS 10

Temperaturbereich:Von LN2 bis zu 600°C in verschiedenen Ausführungen
-160°C (kontrollierte Kühlung)
-196°C (Quench-Kühlung)
Magnet:Elektromagnet bis zu +/- 1 T variables Gleichfeld, Poldurchmesser 76 mm, Stromversorgung 75A / 40V.
Stromumkehrschalter für bipolare Messung. Alternative AC-Option für ein magnetisches Wechselfeld mit ~1 T nutzbarem Feld, bei einer Frequenz von bis zu 0,1 Hz
Stromzufuhr:DC 1nA bis zu 125mA (8 Dekaden / Einhaltung +/- 12V)
AC 16 μA bis zu 20 mA und Eingangsimpedanz: >100 GigaOhm von 1 mHz bis 100 kHz
Messung der Spannung:DC rauscharm / geringe Abweichung 1μV bis zu 2500mV, 4 Dekaden Verstärkung, Digitale Auflösung: 300pV
AC 20 nV bis zu 1V, variable Integrationszeiten und Verstärkung
Sensoren/ Probengeometrie:- von 5 x 5 mm bis 12,5 x 12,5 mm, maximale Probenhöhe 3 mm
- von 17,5 x 17,5 mm bis 25 x 25 mm, Maximale Probenhöhe 5 mm
- von 42,5 x 42,5 mm bis zu 50 x 50 mm, Maximale Probenhöhe 5 mm
- Hochtemperaturplatte, 10x10 mm, maximale Probenhöhe 2 mm
Widerstandsbereich:10-4 bis zu 107(Ωcm)
Trägerstoffkonzentration:107 bis zu 1021cm-3
Mobilitätsbereich:10-3 ~ 107cm2V-1s-1
Atmosphären:Vakuum, inert, oxidierend, reduzierend
Temperaturgenauigkeit:0.05°C

MODELL

HCS 100

Temperaturbereich:RT bis zu 500°C
Magnet:Magnet bis zu 0,5 T (AC oder DC Feld)
Multisegment Halbach Konfiguration, Innendurchmesser: 40mm, Höhe: 98mm
Stromzufuhr:DC 1nA bis zu 125mA (8 Dekaden / Einhaltung +/- 12V)
AC 16 μA bis zu 20 mA und Eingangsimpedanz: >100 GigaOhm von 1 mHz bis 100 kHz"
Messung der Spannung:DC rauscharm / geringe Abweichung 1μV bis zu 2500mV, 4 Dekaden Verstärkung, Digitale Auflösung: 300pV
AC 20 nV bis zu 1V, variable Integrationszeiten und Verstärkung"
Sensoren/ Probengeometrie:Bis zu 10 x 10 mm, maximale Probenhöhe 2,5 mm
Widerstandsbereich:10-5 bis zu 107(Ωcm)
Trägerstoffkonzentration:107 bis zu 1022cm-3
Mobilitätsbereich:1 ~ 107cm2V-1s-1
Atmosphären:Vakuum, inert, oxidierend, reduzierend
Temperaturgenauigkeit:0.05°C

HCS 100 Halbach magnet (donut configuration)

HCS 1: Interchangeable sensors with an EPROM on them, for easy plug-and-play use.

Available accessories

  • Various sample holders are available for measurements from LN2 up to 800°C.
  • The sample holder handle closes the measuring chamber vacuum-tight.
  • The measuring chamber is equipped with an inlet and outlet for gas so that measurements can be carried out under a controlled and changing atmosphere.

The magnet variants of the HCS

Electromagnetic option (HCS 10)

An electromagnet kit is available as an option for the permanent magnet.
The water-cooled electromagnet works in combination with a programmable power supply and a reversing switch.
The power supply can apply currents of up to 75 A, resulting in a variable magnetic field strength of up to +/-1 T.

Detailed view of the measuring body

Permament magnet option (HCS 1)

The HCS 1 is equipped with two magnetic circuits (neodymium), which are mounted on a movable carriage that can be optionally automated.
The system can be equipped with both a low-temperature and a high-temperature extension.

Halbach option (HCS 100)

The HCS 100 uses a magnet in Halbach configuration (permanent magnet in donut configuration) to apply either a DC or an AC magnetic field to the sample.
In combination with an alternating current supplied by a lock-in amplifier, this setup is a powerful tool for the investigation of challenging samples, as offsets and noise can be suppressed in most cases.

Software

Making values visible and comparable

All LINSEIS devices are PC-controlled, with the individual software modules running exclusively under Microsoft® Windows® operating systems.
The integrated software enables easy handling, temperature control, data acquisition and data evaluation.

General:

  • NIST routine to find optimal measurement settings and obtain highly accurate results
  • Extended connection test
  • Possible integration of external electronics
  • Optional database storage
  • Optional integration of a lock-in amplifier
  • Automatic sensor detection (EEPROM)
  • Automatic evaluation
  • Fully automatic cooling control
  • HCS 10 Online access to customization data

Application

Application example: Antimony Thin Film (150 nm Sb)

Antimony (Sb) is a semi-metal that is widely used in the field of thermoelectrics (in the form of alloys, e.g. Bi1-xSbx) and as a new application in the field of microelectronics. However, the largest applications for metallic antimony are lead-antimony plates in lead-acid batteries. The figure shows a complete characterization of a thin film produced by sputter deposition on SiO2/Si substrate with the Linseis HCS 1 (RT to 200°C option).

Well informed

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